| Specifications | According to customer's specific requirements |
| Scanning Angle | ±10° ~ ±20° (optional up to ±30°) |
| Material | BK7, Fused Silica (JGS1), Si, SiC, Beryllium (Be) |
| Diameter Tolerance | +0.0 / -0.01 mm |
| Central Thickness Tolerance | ±0.1mm |
| PV | λ/4 |
| Parallelism | <30'' |
| Surface Quality | 40/20 |
